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Carbon Nanotube Production Device by Chemical Vapor Deposition_CVD1203

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  • 3 independent temperature adjustors are applied to control the temperature at different positions of quartz tube furnace. A quartz tube furnace of large caliber(120mmφ) is applicable to production of carbon nanotube on a large substrate and mass production of common CNTs powders.
  • A precise flow control system can precisely control the import volume of hydrocarbon gas; evaporation device can import ethanol into the device.
  • Equipped with external import device of catalyzer or carrier, receiving device of CNTs, and helix rotary device inside quartz tube to embody continuous or intermittent creation of CNTs.
Basic Technical Parameters
Tube furnace
  • Working temperature 400~1100℃
  • Length of tube with even heating: 250mm
  • Temperature control: 3 temperature adjustor
  • External dimension: W940×H810×D510mm
  • External diameter of heating tube: 120mm φ
  • Breaker capacity: AC200 30A 3-phase
  • Weight: 165kg
Furnace tube
  • Dimension: 120φ×L1400mm;
  • Import tube: 1/2 tube 2pcs
Gas control
  • Gas combination flow meter
  • Gas type N2/H2/CH4 (replaceable)
[CNT composition] liquid fuel import
[CMC composition] co-catalyst import
  • Matrass,
  • Gasification heater,
  • Import tube
Import of catalyzer precursor
  • Test tube,
  • Sublimation heater,
  • Import tube
Vocuum meter
  • Vacuum meter of low-noise tube
Exhaust pump
  • Rotary pump
Made in Tsukuba Japan
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